工艺用水

工艺用水广泛应用于微电子、食品饮料、精细化和原子能工业,特别是微电子技术和半导体集成电路产业。超纯水有各种测试项目,例如:electrics resistivity test,TOC,particle test, Sio2 test and colonial test.超纯水在微电子行业也变得越来越重要。

 

工艺用水过滤系统流程图 

 

① Pre-RO Filtration——保安过滤

Function: are typically used to protect membrane systems from premature fouling and short life and reduce system cost. 5um/10um is commonly used.

 

Item Flow Rate Part Number
Option A
≥100m³/h
Option B
<100m³/h
GUF(聚丙烯深层滤芯)

 

② Resin Fine Filtration——树脂精细过滤

Function: Installed after ions or resin exchange,trap resin fine, avoid of secondary pollution.
Cobetter prodcuts have high filtration efficiency, no ions dissolution, provide high quality water.

 

Item Description Part Number
Option A
Partical control strictly
APS 
(聚醚砜除菌滤芯)0.65/0.45um
Option B
Economical
EPP 3um

 

③ Final Sterile Filtration——终端除菌过滤

Function: Installed on final Filter housing, to remove particles and organisms and protect water quality.
0.22um APSmembrane filter cartridge is commonly used, but if you have strict requirement of particle control,
you can choose APS 0.1um o 0.05um.

■ APS filter cartridge

 

④ Vent Filtration——气体消毒过滤

Application is for sterilize the air or gas. Inside housing gas is separated from outside,
and go through the housing to outside. So the outside organisms and particles can not go inside.
0.01um Hydrophobic PTFE filter is commonly used.

■ GPF filter cartridge

 

如需更多资料,请联系科百特销售部:0571-87704266 / sales@cobetterfilter.com